Ultra Clean Processing of Semiconductor Surfaces XIV
Download or Read eBook Ultra Clean Processing of Semiconductor Surfaces XIV PDF written by Paul Mertens and published by . This book was released on 2018 with total page 0 pages. Available in PDF, EPUB and Kindle.
| Author | : Paul Mertens |
| Publisher | : |
| Total Pages | : 0 |
| Release | : 2018 |
| ISBN-10 | : 3035714177 |
| ISBN-13 | : 9783035714173 |
| Rating | : 4/5 (77 Downloads) |
Book Synopsis Ultra Clean Processing of Semiconductor Surfaces XIV by : Paul Mertens
Book excerpt: The 14th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (14th UCPSS 2018, Leuven, Belgium, September 3-5, 2018) was organized by IMEC and the scope of this symposium includes all issues related to contamination, cleaning and surface preparation in mainstream large-scale Integrated Circuit manufacturing. This collection will be interesting and useful for experts in the field of microelectronics. Microelectronics, Semiconductors, Surface Cleaning, Surface Functionalization, Particle Removal, Etching, Wetting Drying, Pattern Collapse, Interconnects, Contamination Materials Science.
