GaAs processing has reached a mature stage. New semiconductor compounds are emerging that will dominate future materials and device research, although the proce

For courses in Semiconductor Manufacturing Technology, IC Fabrication Technology, and Devices: Conventional Flow. This up-to-date text on semiconductor manufact

This book covers theoretical and practical aspects of all major steps in the fabrication sequence. This book can be used conveniently in a semester length cours

A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and P