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Type: BOOK - Published: 2013-11-11 - Publisher: Springer Science & Business Media
Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numeric
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Type: BOOK - Published: 2012-12-06 - Publisher: Springer Science & Business Media
Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are exper
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An up-to-date description of plasma etching and deposition in semiconductor fabrication.
Language: en
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This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniat
