MEMS Design, Fabrication, Characterization, and Packaging
Download or Read eBook MEMS Design, Fabrication, Characterization, and Packaging PDF written by Uwe F. W. Behringer and published by SPIE-International Society for Optical Engineering. This book was released on 2001 with total page 460 pages. Available in PDF, EPUB and Kindle.
| Author | : Uwe F. W. Behringer |
| Publisher | : SPIE-International Society for Optical Engineering |
| Total Pages | : 460 |
| Release | : 2001 |
| ISBN-10 | : UOM:39015053383447 |
| ISBN-13 | : |
| Rating | : 4/5 (47 Downloads) |
Book Synopsis MEMS Design, Fabrication, Characterization, and Packaging by : Uwe F. W. Behringer
Book excerpt:
