As the requirements of the semiconductor industry have become more demanding in terms of resolution and speed it has been necessary to push photoresist material

This book covers the recent developments in the production of micro and nano size products, which cater to the needs of the industry. The processes to produce t

This new edition of the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from e

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Lithography, the fundamental fabrication process of semiconductor devices, has been playing a critical role in micro-nanofabrication technologies and manufactur