Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon
Download or Read eBook Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon PDF written by Krishna Seshan and published by CRC Press. This book was released on 2002-02-01 with total page 72 pages. Available in PDF, EPUB and Kindle.
Author | : Krishna Seshan |
Publisher | : CRC Press |
Total Pages | : 72 |
Release | : 2002-02-01 |
ISBN-10 | : 9781482269680 |
ISBN-13 | : 1482269686 |
Rating | : 4/5 (80 Downloads) |
Book Synopsis Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon by : Krishna Seshan
Book excerpt: The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition tec