This book covers the experimental and theoretical understanding of surface and thin film processes. It presents a unique description of surface processes in ads

Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this bo

This sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not

The 2nd edition contains new chapters on contamination and contamination control that describe the basics and the issues. Another new chapter on meteorology exp

Prepared as a textbook complete with problems after each chapter, specifically intended for classroom use in universities.