Silicon Micromachining
Download or Read eBook Silicon Micromachining PDF written by Miko Elwenspoek and published by Cambridge University Press. This book was released on 2004-08-19 with total page 424 pages. Available in PDF, EPUB and Kindle.
| Author | : Miko Elwenspoek |
| Publisher | : Cambridge University Press |
| Total Pages | : 424 |
| Release | : 2004-08-19 |
| ISBN-10 | : 0521607671 |
| ISBN-13 | : 9780521607674 |
| Rating | : 4/5 (71 Downloads) |
Book Synopsis Silicon Micromachining by : Miko Elwenspoek
Book excerpt: A comprehensive overview of the key techniques used in the fabrication of micron-scale structures in silicon; for graduate students and researchers.
