Ion Implantation Technology - 94
Download or Read eBook Ion Implantation Technology - 94 PDF written by S. Coffa and published by Newnes. This book was released on 1995-05-16 with total page 1031 pages. Available in PDF, EPUB and Kindle.
| Author | : S. Coffa |
| Publisher | : Newnes |
| Total Pages | : 1031 |
| Release | : 1995-05-16 |
| ISBN-10 | : 9780444599728 |
| ISBN-13 | : 044459972X |
| Rating | : 4/5 (28 Downloads) |
Book Synopsis Ion Implantation Technology - 94 by : S. Coffa
Book excerpt: The aim of these proceedings is to present and stimulate discussion on the many subjects related to ion implantation among a broad mix of specialists from areas as diverse as materials science, device production and advanced ion implanters.The contents open with a paper on the future developments of the microelectronics industry in Europe within the framework of the global competition. The subsequent invited and oral presentations cover in detail the following areas: trends in processing and devices, ion-solid interaction, materials science issues, advanced implanter systms, process control and yield, future trends and applications.
