This volume collects together for the first time a series of in-depth, critical reviews of important topics in dry etching, such as dry processing of III-V comp

This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniat

Semiconductor market value of 2018 was around 468.8 billion US dollars. It is increased for about 13.7% than year 2017. For 2019, it is estimated decrease about

This book has been written as part of a series of scientific books being published by Plenum Press. The scope of the series is to review a chosen topic in each

Catalytic Reactors presents several key aspects of reactor design in Chemical and Process Engineering. Starting with the fundamental science across a broad inte